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Title: Topography characterization of a deep grating using near-field imaging
Type: Journal articleJournal article
Participant(s):
Author:  Gregersen, Niels (Cwisno: 24208)
Technical University of Denmark
Email:

Author:  Tromborg, Bjarne (Cwisno: 5989)
Technical University of Denmark
Email:

Forfatter:  Volkov, Valentyn S.
Aalborg University, Department of Physics and Nanotechnology

Forfatter:  Bozhevolnyi, Sergey I.
Aalborg University, Department of Physics and Nanotechnology

Forfatter:  Holm, Johan
Ibsen Photonics A/S
Abstract: Using near-field optical microscopy at the wavelength of 633 nm, we image light intensity distributions at several distances above an ~2-mm deep and a 1-mm-period glass grating illuminated from below under the condition of total internal reflection. The intensity distributions are numerically modeled, and an inversion procedure based on a least-squares-fit optimization is employed to extract the grating geometry from the optical images.
Published: in journal: Applied Optics (ISSN: 0003-6935), vol: 45, issue: 1, pages: 117-121, 2006
See the publication in DTU Orbit See the publication in DTU Orbit

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