|
Aligner |
MA1006 KV Aligner |
|
Dielectric Evaporator |
Dielectric Evaporator |
|
Oven |
Anneal and oxidation furnace |
|
Plasma Asher |
Diener Pico Plasma Asher |
|
Profiler |
Dektak 3ST stylus profiler |
|
RIE |
III-V reactive ion etch |
|
Spinner |
Spinner for III-V and highly toxic resists |
|
Metal Evaporator |
Physimeca metal evaporator |
|
PL-Mapper |
PL-mapper |
|
SEM-JEOL |
JEOL JSM 5500LV Scanning Electron Microscope |