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DTU Danchip > Capabilities > Equipment
Cleanroom Tour
Nanostructures
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Photolithography
Electron Beam Lithography
Thin Film Deposition
Etch
Wafer Cleaning
Thermal Process
III-V Laboratory
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Characterization
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Equipment at DTU Danchip
 
Last updated 20.12.2009
Responsible: Jörg Hübner
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